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Vacuum Side Parts

 

Oxford Instruments supplies cryopump rebuild kits for the vacuum side of the cryopump. There are three main components to the vacuum side of a cryopump. The inlet array, radiation shield and charcoal arrays (15K array). Replacement condensing arrays are available for most cryopump models. Periodic replacement of the cryopump cryo-adsorbing array will ensure the vacuum system is operating at maximum performance. 

15K Charcoal Arrays
15K Charcoal Arrays
Cryo-Torr 100
Cryo-Torr 100
CryoPlex8/CT8
CryoPlex8/CT8
CryoPlex8LP/CT8F
CryoPlex8LP/CT8F
CryoPlex10/CT10
CryoPlex10/CT10
CryoPlex16/CT400
CryoPlex16/CT400
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