Based on proven scroll compressor technology, the Austin Scientific M600 air or water cooled helium compressors are highly versatile, with particular focus on ease of installation and maintenance.
Multiple pump configurations
M600 series can easily produce sufficient cooling to run multiple cryopumps for cluster tool and other applications
60 scfm helium throughput
Efficiently drives single or multiple pump configurations
Three CP-8 or CP-8 Low Profile pumps
Two CP-10 cryopumps
Standard, APD, Leybold drive units
Fully interchangeable and compatible with Helix Cryotorr ® pumps
M600-OB specifically configured for Helix ® On- Board pumps.
Proven reliability
Deployed for five years in production environments globally running multiple Austin Scientific and competitor pumps.
Air and water versions with equal reliability andcooling capacity
High and low voltage versions at 50 and 60 Hz.
Small footprint
Water (H-21" x W-17.25" x D-19.75")
Air (H-26" x W-17.5" x D-32")
Quiet with low vibration - ideal for semiconductor, industrial and coating customers
Designed with all utilities on the front of the unit, allowing convenient rack or cabinet installation and easy routine maintenance
Diagnostics
Built in water flow meter displays flow and cooling water condition.
Individual supply and return pressure gauges provide better diagnostics
Compressor can be controlled and monitored remotely
Maintenance
Adsorber change is simplified with removable front panel - no need to remove multiple covers.
Electrical box is modular and is a field replaceable unit
